Title :
Millions of cantilevers and atomic force microscopy up to 100 MHz
Author_Institution :
Inst. of Ind. Sci., Tokyo Univ., Japan
Abstract :
In this paper, gives an overview on a currently running project entitled "Atomic Force Microscopy up to 1GHz". The project is addressed in the following three issues; (i) nanocantilever fabrication, (ii) cantilever detection and excitation, and (iii) circuitry.
Keywords :
atomic force microscopy; elemental semiconductors; light interferometers; silicon; 100 MHz; Si; atomic force microscopy; cantilever detection; cantilever excitation; light interferometers; nanocantilever fabrication; Atomic force microscopy; Diode lasers; Face detection; Frequency; Laser excitation; Optical filters; Optical imaging; Optical interferometry; Optical mixing; Silicon;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2003. Digest of Papers. 2003 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-040-2
DOI :
10.1109/IMNC.2003.1268756
