DocumentCode
2581609
Title
Fluorescence measurement of nanopillars fabricated by high aspect nanoprint technology
Author
Kuwabara, K. ; Ogino, M. ; Motowaki, S. ; Miyauchi, A.
Author_Institution
Hitachi Res. Lab., Hitachi Ltd., Japan
fYear
2003
fDate
29-31 Oct. 2003
Firstpage
338
Lastpage
339
Abstract
In this paper, our aim is to form high aspect structures (nanopillars) by high aspect nanoprint (Hi-NP) technology.
Keywords
fluorescence; nanolithography; nanostructured materials; polymer films; fluorescence; high aspect nanoprint technology; high aspect structure; nanopillars; soft lithography; Biological materials; DNA; Fluorescence; Laboratories; Large scale integration; Nanostructures; Proteins; Semiconductor device measurement; Soft lithography; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2003. Digest of Papers. 2003 International
Conference_Location
Tokyo, Japan
Print_ISBN
4-89114-040-2
Type
conf
DOI
10.1109/IMNC.2003.1268784
Filename
1268784
Link To Document