Temperature controlled measurement setup for permittivity extraction of water up to 40 GHz from 10 to 40 °C

The proposed system in this paper enables the temperature controlled permittivity extraction of liquids up to 40 GHz from 10 to 40 °C. The temperature controlled environment consists of a temperature controlled chuck, probe station and a CPW microwave sensor that is coupled to a miniature T-type thermocouple. A large thermal mass and a platinum wire resistor ensure a precise reference temperature. Challenges in the sensor fabrication and measurements are discussed and further improvements are proposed for higher accuracy measurements. Extracted permittivity of water agrees well with the empirical models available in the literature.