Title :
Channel Profile Control Based On Transient-enhanced-diffusion Suppression By RTA For 0.18 /spl mu/m Single Gate CMOS
Author :
Furukawa, A. ; Teramoto, A. ; Shimizu, S. ; Abe, Y. ; Tokuda, Y.
Author_Institution :
ULSI Laboratory, Mitsubishi Electric Corporation 4-1, Mizuhara, Itami, Hyogo 664, Japan
Conference_Titel :
VLSI Technology, 1997. Digest of Technical Papers., 1997 Symposium on
Print_ISBN :
4-930813-75-1
DOI :
10.1109/VLSIT.1997.623708
