Title :
A 4″ wafer photostepper-based carbon nanotube FET technology for RF applications
Author :
Schroter, M. ; Kolev, P. ; Wang, D. ; Eron, M. ; Lin, S. ; Samarakone, N. ; Bronikowski, M. ; Yu, Z. ; Sampat, P. ; Syams, P. ; McKernan, S.
Author_Institution :
RFNano Corp., Newport Beach, CA, USA
Abstract :
Depletion-mode CNTFETs have been fabricated on 4" wafers with a photostepper-based process. The transistors show significant current and power gain with peak (fT, fmax) values of (9, 10) GHz. Compact model results are compared to experimental characteristics over bias and frequency. First RF amplifier circuit results are also shown.
Keywords :
carbon nanotubes; field effect transistors; nanotube devices; radiofrequency amplifiers; C; RF amplifier circuit; RF applications; depletion-mode CNTFET; photostepper-based process; power gain; size 4 in; transistors; wafer photostepper-based carbon nanotube FET technology; CNTFETs; Electron tubes; Gain; Integrated circuit modeling; Logic gates; Radio frequency; CNTFET modeling; CNTFET technology; Carbon nanotube FETs; RF applications;
Conference_Titel :
Microwave Symposium Digest (MTT), 2011 IEEE MTT-S International
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-61284-754-2
Electronic_ISBN :
0149-645X
DOI :
10.1109/MWSYM.2011.5972750