DocumentCode

2584296

Title

A Novel Technique For 3-d Integration: Ge-seeded Laterally Crystallized TFTs

Author

Subramanian, V. ; Saraswat, K.C.

Author_Institution

Electrical Engineering Department Stanford University Stanford, CA 94305, USA

fYear

1997

fDate

10-12 June 1997

Firstpage

97

Lastpage

98

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1997. Digest of Technical Papers., 1997 Symposium on

Print_ISBN

4-930813-75-1

Type

conf

DOI

10.1109/VLSIT.1997.623713

Filename

623713