Enlarged sample holder for optical AFM imaging: Millimeter scanning with high resolution

Author

Sinno, A. ; Ruaux, P. ; Chassagne, L. ; Topcu, S. ; Alalyli, Y. ; Lerondel, G. ; Blaize, S. ; Bruyant, A. ; Royer, P.

Author_Institution

LISV, PRES Univ. of Versailles, Versailles, France

fYear

2009

fDate

18-23 May 2009

Firstpage

2070

Lastpage

2074

Abstract

We developed a home-made sample-holder unit used for 2D nano-positioning with millimeter traveling ranges. For each displacement axis, the system includes a long range traveling stage and a piezoelectric actuator for accurate positioning. Specific electronics is integrated according to metrological considerations, enhancing the repeatability performances. The aim of this work is to demonstrate that near-field microscopy at the scale of a chip is possible. We chose here to characterize highly integrated optical structures. For this purpose, the sample-holder is integrated into an atomic force microscope in order to perform optical imaging. To demonstrate the overall performances, a millimeter scale optical images have been realized.

Keywords

atomic force microscopy; image resolution; nanopositioning; optical images; piezoelectric actuators; 2D nanopositioning; atomic force microscope; enlarged sample holder; integrated optical structures; millimeter scanning; millimeter traveling ranges; near-field microscopy; optical AFM imaging; piezoelectric actuator; Atom optics; Atomic force microscopy; High-resolution imaging; Image resolution; Integrated optics; Laboratories; Metrology; Optical imaging; Optical microscopy; Piezoelectric actuators; AFM/SNOM; Nanodisplacement; Nanometrology; Optical Imaging;

fLanguage

English

Publisher

ieee

Conference_Titel

EUROCON 2009, EUROCON '09. IEEE

Conference_Location

St.-Petersburg

Print_ISBN

978-1-4244-3860-0

Electronic_ISBN

978-1-4244-3861-7

Type

conf

DOI

10.1109/EURCON.2009.5167933

Filename

5167933