Title :
Physical-chemical foundations of piezo-acoustic sensing mechanisms
Author :
Johannsmann, Diethelm
Abstract :
Piezoelectric resonators are in use as mass-sensing devices for almost half a century. More recently it was recognized that shifts in frequency and bandwidth can come about by a diverse variety of interactions with the sample. The classical “load” consists of a thin film, which shifts the resonance frequency due to its inertia. Other types of loading include semi-infinite viscoelastic media, rough objects contacting the crystal via isolated asperities, mechanically nonlinear contacts, and dielectric films. These interactions are now rather well understood and will be presented in a unified framework.
Keywords :
Bandwidth; Dielectric films; Dielectric thin films; Elasticity; Frequency diversity; Piezoelectric devices; Piezoelectric films; Resonance; Resonant frequency; Viscosity;
Conference_Titel :
Frequency Control Symposium, 2009 Joint with the 22nd European Frequency and Time forum. IEEE International
Conference_Location :
Besancon, France
Print_ISBN :
978-1-4244-3511-1
Electronic_ISBN :
1075-6787
DOI :
10.1109/FREQ.2009.5168119