Title :
Integration of AlN micromechanical contour-mode technology filters with three-finger dual beam AlN MEMS switches
Author :
Sinha, Nipun ; Mahameed, Rashed ; Zuo, Chengjie ; Piazza, Gianluca
Author_Institution :
Mech. Eng. & Appl. Mech., Univ. of Pennsylvania, Philadelphia, PA, USA
Abstract :
In this paper, we present the first demonstration of the monolithic integration of Aluminum Nitride (AlN) micromechanical contour mode technology filters with dual-beam actuated MEMS AlN switches. This integration has lead to the development of the first prototype of a fully-integrated all-mechanical switchable filter. Integration has been demonstrated by using AlN contour-mode MEMS filters at two center frequencies, i.e. 98.7 and 279.9 MHz. The micromechanical switch design used here is a novel three-finger dual-beam topology that improves the isolation and insertion loss of the switch by decreasing the parasitic coupling between the DC and RF signals over a previous AlN MEMS dual beam design. With the use of just one switch fabricated right next to, and integrated with the filter, the AlN MEMS filter is effectively turned off and its pass-band transmission is lowered to the out of band level at 279.9 MHz.
Keywords :
microswitches; monolithic integrated circuits; aluminum nitride; dual beam MEMS switches; frequency 279.9 MHz; microelectromechanical system; micromechanical contour mode technology filters; monolithic integration; switch insertion loss; three-finger dual beam topology; Aluminum nitride; Band pass filters; Frequency; Micromechanical devices; Microswitches; Monolithic integrated circuits; Prototypes; Signal design; Switches; Topology;
Conference_Titel :
Frequency Control Symposium, 2009 Joint with the 22nd European Frequency and Time forum. IEEE International
Conference_Location :
Besancon
Print_ISBN :
978-1-4244-3511-1
Electronic_ISBN :
1075-6787
DOI :
10.1109/FREQ.2009.5168131