Title :
IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop. World-Class Manufacturing. ASMC ´90 Proceedings (Cat. No.90CH2902-5)
Abstract :
The following topics are dealt with: manufacturing management approaches; just-in-time methods: using simulation in semiconductor fabrication: process control: polyimide stress buffers in IC technology: yield enhancement: framework for a defect reduction program; yield modeling in a custom IC manufacturing line: integrated process improvement methodologies; measurement system capability analysis: and inline process monitoring using surface charge analysis
Keywords :
integrated circuit manufacture; management; process control; production control; semiconductor device manufacture; stock control; IC technology; custom IC manufacturing line; defect reduction program; inline process monitoring; integrated process improvement methodologies; just-in-time methods; manufacturing management; measurement system capability analysis; polyimide stress buffers; process control; semiconductor fabrication; simulation; surface charge analysis; yield enhancement; yield modeling;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1990. ASMC 90 Proceedings. IEEE/SEMI 1990
Conference_Location :
Danvers, MA, USA
DOI :
10.1109/ASMC.1990.111210
