Title :
Framework for a defect reduction program
Author :
Duffy, Brian ; Cumming, George ; Fletcher, David
Author_Institution :
Digital Equipment Corp., Hudson, MA, USA
Abstract :
A framework for defect reduction is presented which integrates management commitment, a focused organizational structure, state-of-the-art defect detection and analysis tools, and cooperation between the organizations that affect the quality of the material shipped from a wafer fab line. Considerations for organizational design, the role of the defect reduction engineer, and the defect reduction strategy are presented along with specific defect density, and yield improvement examples
Keywords :
integrated circuit manufacture; monolithic integrated circuits; quality control; defect density; defect detection tools; defect reduction engineer; defect reduction program; defect reduction strategy; management commitment; organizational structure; wafer fab line; yield improvement; Automatic testing; Circuit synthesis; Computerized monitoring; Design engineering; Engineering management; Inspection; Manufacturing processes; Production; Quality management; Semiconductor device modeling;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1990. ASMC 90 Proceedings. IEEE/SEMI 1990
Conference_Location :
Danvers, MA
DOI :
10.1109/ASMC.1990.111224
