DocumentCode
2591941
Title
Integrated sensor and electronics processing for >10^8 "iMEMS" inertial measurement unit components
Author
Lewis, S. ; Alie, S. ; Brosnihan, T. ; Core, C. ; Core, T. ; Howe, R. ; Geen, J. ; Hollocher, D. ; Judy, M. ; Memishian, J. ; Nunan, K. ; Paine, R. ; Sherman, S. ; Tsang, B. ; Wachtmann, B.
Author_Institution
Analog Devices, Cambridge, MA, USA
fYear
2003
fDate
8-10 Dec. 2003
Abstract
There is often a large gap between theory and practice in electronics. Making one of a "device" in a lab is a far cry from turning out 10\´s of millions. For a technology to succeed both must happen. This paper addresses the latter discipline. Presented are selected details on the processes and products involved in commercially producing over 120 million integrated MEMS inertial measurement devices, i.e., accelerometers and gyroscopes.
Keywords
accelerometers; gyroscopes; mass production; microsensors; packaging; commercial production; gyroscopes; iMEMS; inertial measurement unit components; integrated MEMS accelerometers; integrated sensor/electronics processing; packaging; Accelerometers; Costs; Geometry; Gyroscopes; Measurement units; Microelectromechanical devices; Micromachining; Micromechanical devices; Packaging; Production;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International
Conference_Location
Washington, DC, USA
Print_ISBN
0-7803-7872-5
Type
conf
DOI
10.1109/IEDM.2003.1269435
Filename
1269435
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