Title :
Numerical Modeling Of Optical Metrology Schemes For IC Line-width Measurements
Author :
Yuan, Chi-Min ; Strojwas, Andrzej J.
Author_Institution :
Carnegie Mellon University
Keywords :
Electric variables measurement; Integrated circuit modeling; Interference; Light scattering; Metrology; Numerical models; Optical scattering; Photonic integrated circuits; Size measurement; Wavelength measurement;
Conference_Titel :
Numerical Modeling of Processes and Devices for Integrated Circuits, 1990. NUPAD III. 1990 Workshop on
DOI :
10.1109/NUPAD.1990.748248
