Optical and Glow Diagnostics of 13.56-MHz RF Plasma-PVDF Membrane Surface Interactions

Author

Chun Huang ; Ching-Yuan Tsai ; Wei-Chun Ma ; Kuan-Ying Lai

Author_Institution

Dept. of Chem. Eng. & Mater. Sci., Yuan Ze Univ., Chungli, Taiwan

Volume

42

Issue

10

fYear

2014

fDate

Oct. 2014

Firstpage

2568

Lastpage

2569

Abstract

The glow characteristics and optical emission features of 13.56-MHz radio frequency (RF) argon plasmapoly(vinylidene fluoride) membrane surface interactions were studied. The glow of RF plasma surface modification was characterized by optical photography and optical emission spectroscopy. The glow differences were attributed to the nature of the luminous gas phase in respect to chemically reactive species.

Keywords

argon; glow discharges; high-frequency discharges; membranes; plasma diagnostics; plasma materials processing; plasma-wall interactions; polymers; 13.56-MHz RF plasma-PVDF membrane surface interactions; 13.56-MHz radio frequency argon plasma-poly(vinylidene fluoride) membrane surface interactions; Ar; chemically reactive species; frequency 13.56 MHz; glow characteristics; glow diagnostics; luminous gas phase; optical diagnostics; optical emission spectroscopy; optical photography; Argon; Chemicals; Plasmas; Polymers; Radio frequency; Stimulated emission; Surface treatment; Plasma Applications Surface; Plasma Applications Surface.;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/TPS.2014.2323996

Filename

6823118