Title :
A Rigorous Model For Dopant-dopant Pair Diffusion In Silicon
Author :
Orlowski, Marius
Author_Institution :
Motorola Inc.
Keywords :
Boron; Delta modulation; Displays; Equations; Impurities; Semiconductor process modeling; Silicon; Thermodynamics;
Conference_Titel :
Numerical Modeling of Processes and Devices for Integrated Circuits, 1990. NUPAD III. 1990 Workshop on
DOI :
10.1109/NUPAD.1990.748250
