DocumentCode
2596934
Title
Analysis Of Sidewall Lateral Parasitic Leakage In A 16-mb Dram Cell
Author
Geissler, Stephen F. ; Mandelman, Jack A.
Author_Institution
IBM General Technology Division
fYear
1990
fDate
3-4 Jun 1990
Firstpage
23
Lastpage
24
Keywords
FETs; Failure analysis; Finite element methods; Geometry; Lifting equipment; Numerical analysis; Predictive models; Random access memory; Very large scale integration; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Numerical Modeling of Processes and Devices for Integrated Circuits, 1990. NUPAD III. 1990 Workshop on
Type
conf
DOI
10.1109/NUPAD.1990.748258
Filename
748258
Link To Document