Title :
Retardation of Dopant Diffusion During Fabrication and Effects Upon Junction Depth and Microelectronic Device Performance
Author :
Pemsel, E.R. ; Lytle, W.J. ; Dzimianski, J.W. ; Skinner, S.M.
Author_Institution :
Westinghouse Electric Corporation, Aerospace Division, Baltimore, Maryland
Keywords :
Diodes; Etching; Fabrication; Microelectronics; Photovoltaic systems; Resistors; Silicon; Solar power generation; Surface cleaning; Surface topography;
Conference_Titel :
Physics of Failure in Electronics, 1964. Third Annual Symposium on the
Conference_Location :
Chicago, IL, USA
DOI :
10.1109/IRPS.1964.362301
