Title :
Durability and Stability of Various Insulating Films Against the High Temperature Water in an Autoclave
Author :
Sato, J. ; Ban, Y. ; Maeda, K.
Author_Institution :
ICs Engineering Department, FUJITSU Ltd., Kawasaki, Japan
Abstract :
We have investigated the reliability of various electronic devices and materials in high temperature water and moisture using an autoclave currently used for the reliability tests in several fields. It appears that there are different types of corrosion and instability phenomena among various insulating fillns on silicon. Reliability problems of Silicon Nitride (Si3N4), of Silicon Dioxide (SiO2) and of other films will be discussed.
Keywords :
Corrosion; Electronic equipment testing; Insulation; Materials reliability; Materials testing; Moisture; Semiconductor films; Silicon compounds; Stability; Temperature;
Conference_Titel :
Reliability Physics Symposium, 1971. 9th Annual
Conference_Location :
Las Vegas, NV, USA
DOI :
10.1109/IRPS.1971.362500
