A dual-mass MEMS vibratory gyroscope with adaptive control scheme

Author

Wang, Cunchao ; Wang, Shourong ; Yin, Yong

Author_Institution

Sch. of Instrum. Sci. & Eng., Southeast Univ., Nanjing

fYear

2007

fDate

2-5 Aug. 2007

Firstpage

25

Lastpage

28

Abstract

A micromachined vibratory gyroscope with two proof-masses to measure rotation rate is presented. The two proof-masses are driven electrostatically in opposite directions along drive axis to generate differential Coriolis force detection. In order to improve the performance of the MEMS gyroscope, an adaptive control method is developed. This scheme tunes the drive natural frequencies of gyroscope to a given frequency, regulates the amplitudes of the drive axis to a required value, achieves translational acceleration elimination, cancels out quadrature error due to stiffness coupling, and drives the sense axis vibration to zero for dynamic range and precision improvement. Simulation results verify the theoretical analysis.

Keywords

adaptive control; gyroscopes; micromechanical devices; adaptive control method; differential Coriolis force detection; dual-mass MEMS vibratory gyroscope; Acceleration; Adaptive control; Analytical models; Dynamic range; Electrostatic measurements; Frequency; Gyroscopes; Micromechanical devices; Rotation measurement; Vibration measurement; Adaptive control; dual-mass; gyroscope; microelectromechanical system (MEMS) gyroscope;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology, 2007. IEEE-NANO 2007. 7th IEEE Conference on

Conference_Location

Hong Kong

Print_ISBN

978-1-4244-0607-4

Electronic_ISBN

978-1-4244-0608-1

Type

conf

DOI

10.1109/NANO.2007.4601133

Filename

4601133