DocumentCode :
2603383
Title :
A novel design methodology for MEMS device
Author :
Zhao, Xin ; Wang, Lei ; Tan, Yiyong ; Sun, Guangyi ; Lu, Guizhang
Author_Institution :
Inst. of Robot. & Autom. Inf. Syst., Nankai Univ., Tianjin
fYear :
2007
fDate :
2-5 Aug. 2007
Firstpage :
39
Lastpage :
44
Abstract :
Due to MEMS device needs highly accurate design, a novel design methodology for MEMS device is put forward in this paper. Firstly, top-down and bottom-up hybrid design process based on IP library is proposed. It facilitates and speeds up design cycle and reduces the expense of MEMS design by using IP components which have been successfully implemented. Secondly, virtual fabrication process is proposed. It is used to establish stable, accurate and robust 3D geometry of device according to the fabrication process. Voxel-based visualization technique is applied to virtual fabrication process to achieve better process simulation result. It could help designers achieve highly accurate fabrication process and result. Thirdly, virtual operation is proposed. It is used to visualize and simulate the mechanical operation of MEMS device. This module could exhibit 3D realistic animation in virtual reality (VR) environment. It could help designers achieve highly accurate physical operation characteristic of MEMS device. With the help of virtual fabrication process and virtual operation, intuitive image and realistic animation of MEMS device is exhibited at the design stage. An available prototyping MEMS CAD which implements both top-down and bottom-up design notion integrates with virtual fabrication process and virtual operation. A bimetallic thermally-actuated micropump is studied through the paper using this novel design methodology.
Keywords :
micromechanical devices; semiconductor device models; 3D realistic animation; CAD; MEMS device; bimetallic thermally-actuated micropump; bottom-up hybrid design process; robust 3D geometry; semiconductor device design; semiconductor device fabrication; semiconductor device simulation process; top-down hybrid design process; voxel-based visualization technique; Animation; Design methodology; Fabrication; Libraries; Microelectromechanical devices; Micromechanical devices; Process design; Robustness; Virtual reality; Visualization; IP library; MEMS; Microfluidic Device; Virtual Fabrication Process; Virtual Operation; Virtual Reality;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nanotechnology, 2007. IEEE-NANO 2007. 7th IEEE Conference on
Conference_Location :
Hong Kong
Print_ISBN :
978-1-4244-0607-4
Electronic_ISBN :
978-1-4244-0608-1
Type :
conf
DOI :
10.1109/NANO.2007.4601136
Filename :
4601136
Link To Document :
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