Title :
Maneuvering Pull-in Voltage of an Electrostatic Micro-switch by Introducing a Pre-charged Electrode
Author :
Yang, Hyun-Ho ; Lee, Jeong Oen ; Yoon, Jun-Bo
Author_Institution :
Korea Adv. Inst. of Sci. & Technol., Yuseong
Abstract :
A new method to greatly reduce and control the pull-in voltage of an electrostatic micro-switch was developed, simply by introducing a pre-charged floating electrode. For showing feasibility, the conventional electrostatic micro-switch is used with substrate biasing. Using this method, the original pull-in voltage of 48 V was reduced to 3 V and symmetrical hysteric curve around 0 V was obtained like an ideal non-volatile memory.
Keywords :
electrodes; electrostatic devices; microswitches; electrostatic micro-switch; pre-charged floating electrode; pull-in voltage control; substrate biasing; symmetrical hysteric curve; voltage 3 V; voltage 48 V; Electrodes; Electrostatic actuators; Insulation; Microactuators; Micromechanical devices; Microswitches; Nonvolatile memory; Springs; Switches; Voltage control;
Conference_Titel :
Electron Devices Meeting, 2007. IEDM 2007. IEEE International
Conference_Location :
Washington, DC
Print_ISBN :
978-1-4244-1507-6
Electronic_ISBN :
978-1-4244-1508-3
DOI :
10.1109/IEDM.2007.4418967
