Title :
Assembly of nano optics by an integrated probe-based system
Author :
Fok, L.M. ; Liu, Y.H. ; Li, Wen J.
Author_Institution :
Dept. of Mech. & Autom. Eng., Chinese Univ. of Hong Kong, Hong Kong
Abstract :
Repeatable manipulation and auto-assembly of nano-scale components is a critical potential for future developments in nano optics, opto-electronics, hybrid microelectromechanical (MEMS) systems, and nano-scale devices. This paper focuses on the fabrication of nano structures using single probe with force feedback. The structures that are fabricated can be used for both rapid prototyping and for replication. A description of the manipulation system is presented along with a discussion on the basic manipulation capabilities. Force feedback has been employed, the vertical contact force was determined by a force control system during manipulation.
Keywords :
integrated optics; micro-optics; nanotechnology; optical fabrication; replica techniques; MEMS; force control system; force feedback; hybrid microelectromechanical systems; integrated probe-based system; manipulation system; nanooptics assembly; optical fabrication; optoelectronics; rapid prototyping; replication; vertical contact force; Assembly systems; Force feedback; Integrated optics; Micromechanical devices; Nanoscale devices; Optical device fabrication; Optical devices; Optical feedback; Probes; Prototypes; Atomic Force Microscope; nano optics; nanolithography; probe-based manipulation;
Conference_Titel :
Nanotechnology, 2007. IEEE-NANO 2007. 7th IEEE Conference on
Conference_Location :
Hong Kong
Print_ISBN :
978-1-4244-0607-4
Electronic_ISBN :
978-1-4244-0608-1
DOI :
10.1109/NANO.2007.4601246
