Title :
Lumped Model For Single Silicon Beam Filters
Author :
Hribeek, M. ; Newcomb, Robert W.
Author_Institution :
University of Belgrade
Keywords :
Circuits; Etching; Filters; Frequency; Partial differential equations; Resonance; Silicon; Springs; Transfer functions; Voltage;
Conference_Titel :
Circuits, Systems and Computers, 1977. Conference Record. 1977 11th Asilomar Conference on
DOI :
10.1109/ACSSC.1977.748962
