Scanning Acoustic Microscopy - Application to Fault Detection

This paper describes the characteristics of a scanning acoustic microscope operated at 375 MHz in the pulsed reflection mode with a spatial resolution of about 1.3 pm, and discusses its demonstrated and potential application to the diagnostic study of integrated circuits and components. Direct comparisons are made with scanning electron microscope and optical microscope displays, and the technique is compared with a reported liquid-crystal technique. The scanning acoustic microscope demonstrates high resolution, high contrast, and large depth of field; is simple to operate; and does not charge the substrate or require a vacuum. High detection sensitivity should result from imDroved signal processing.