Title :
A Novel Actuator for High-Precision Alignment in a Nano-Imprint Multi-Layers-Interconnection Fabrication
Author :
Teo, Tat Joo ; Chen, I-Ming ; Yang, Guilin ; Lin, Wei
Author_Institution :
Sch. of Mech. & Aerosp. Eng., Nanyang Technol. Univ., Singapore
Abstract :
This paper presents a novel flexural-based nano-positioning actuator that has a positioning accuracy of 10 nm (limited by encoder resolution) throughout a range of 3 mm. A new dual-magnet configuration is introduced to enhance this electromagnetically driven actuator in achieving 60 N/Amp in a compact configuration. In addition, a constant and evenly distributed magnetic flux density is obtained throughout 11 mm of air gap. A new mathematical model is presented to accurately predict the behavior of magnetic field within the effective air gap of this configuration. Complete analytical models for this actuator´s electromagnetic drive and flexural-bearing support element are presented. Lastly, a prototype of this actuator is developed for validating the established analytical models and verifying the claimed capabilities.
Keywords :
electromagnetic actuators; integrated circuit interconnections; integrated circuit manufacture; nanolithography; nanopositioning; soft lithography; air gap; dual-magnet configuration; electromagnetic drive; electromagnetically driven actuator; flexural-based nanopositioning actuator; flexural-bearing support element; high-precision alignment; magnetic field behavior; magnetic flux density; nanoimprint multilayer-interconnection fabrication; Analytical models; Electromagnetic forces; Fabrication; Hydraulic actuators; Lithography; Manufacturing processes; Mathematical model; Nanopositioning; Prototypes; Substrates;
Conference_Titel :
Robotics and Automation, 2007 IEEE International Conference on
Conference_Location :
Roma
Print_ISBN :
1-4244-0601-3
Electronic_ISBN :
1050-4729
DOI :
10.1109/ROBOT.2007.363183
