DocumentCode :
2626406
Title :
Design of Real-Time Image Acquisition System of IC Wafer
Author :
Wu Li Ming ; Li Dong Dong ; Wang Gui Tang
Author_Institution :
Guangdong Univ. of Technol., Guangzhou
fYear :
2007
fDate :
21-23 Nov. 2007
Firstpage :
1053
Lastpage :
1058
Abstract :
The real-time image acquisition system of micro automatic defects detection of IC wafer surface is researched. With semiconductor chips technology developing towards being minimized, IC wafer magnification increasing and image acquisition vision area getting small, the volume of image data become huge. The traditional PC focusing judgment and realtime control ability do not meet the practical demand. This paper gives the solution to solve the problem by the way of the real-time image focusing judgment and Z-axis focusing control. In this paper, the approach of image acquisition system software design and multitask control implementation in the condition of embedded operating system nucleus plus to improve stability and upgrade capability of the system is proposed. The startup procedure of Nucleus PLUS is introduced and details of the process of transplanting nucleus PLUS to S3C2410A is discussed. The major points and difficulties of the transplantation are analyzed.
Keywords :
electronic engineering computing; image processing; integrated circuits; operating systems (computers); semiconductor technology; IC wafer magnification; embedded operating system; image acquisition system software; microautomatic defects detection; semiconductor chips technology; Automatic control; Control systems; Focusing; Image analysis; Integrated circuit testing; Microprocessors; Microscopy; Real time systems; System analysis and design; System testing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Convergence Information Technology, 2007. International Conference on
Conference_Location :
Gyeongju
Print_ISBN :
0-7695-3038-9
Type :
conf
DOI :
10.1109/ICCIT.2007.160
Filename :
4420398
Link To Document :
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