DocumentCode
2631475
Title
Efficient fiber to SOI photonic wire coupler fabricated using standard CMOS technology
Author
Roelkens, G. ; Dumon, P. ; Bogaerts, W. ; Van Thourhout, D. ; Baets, R.
Author_Institution
Dept. of Inf. Technol., Ghent Univ., Belgium
fYear
2005
fDate
22-28 Oct. 2005
Firstpage
214
Lastpage
215
Abstract
We present a silicon-on-insulator spot size converter fabricated using 248 nm deep UV lithography. The loss of the taper structure is around 1 dB over more than 60 nm in wavelength range while the overall coupling loss from a lensed fiber into a 590 nm wide SOI waveguide was measured to be 1.9 dB.
Keywords
CMOS integrated circuits; optical fibre couplers; optical fibre fabrication; optical fibre losses; silicon-on-insulator; ultraviolet lithography; 1 dB; 248 nm; SOI photonic wire coupler; coupling loss; deep UV lithography; lensed fiber; silicon-on-insulator spot size converter; standard CMOS technology; CMOS technology; Optical fiber couplers; Optical fiber devices; Optical refraction; Optical variables control; Optical waveguides; Photonics; Polymers; Silicon on insulator technology; Wire;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society, 2005. LEOS 2005. The 18th Annual Meeting of the IEEE
Print_ISBN
0-7803-9217-5
Type
conf
DOI
10.1109/LEOS.2005.1547946
Filename
1547946
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