Dynamic deformation of stretched membrane in drum-type micromirror

Author

Kundu, Subrata Kumar ; Hikita, Akiyoshi ; Kumagai, Shinya ; Sasaki, Minoru

Author_Institution

Dept. of Adv. Sci. & Technol., Toyota Technol. Inst., Nagoya, Japan

fYear

2011

fDate

6-9 Nov. 2011

Firstpage

255

Lastpage

260

Abstract

Realizing an optically flat surface during high-speed scanning is a crucial factor for the micromirror with large mirror plate. This paper presents the dynamic deformation analysis of stretched polycrystalline (poly-) Si membrane of flat and lightweight drum-type micromirror. The drum-type micromirror is realized using a tense poly-Si membrane across a rigid crystalline (c-) Si ring. The total peak-to-valley surface deformation realized in the designed micromirror is about 50 nm and observed on the connecting part between the c-Si ring and the poly-Si membrane. The stress concentration in this connecting part is investigated using the amount of surface distortion. The amount of the dynamic deformation in the poly-Si membrane is less than 40 nm. This satisfies the optical flatness compared to the wavelength of blue light.

Keywords

deformation; distortion; elemental semiconductors; membranes; micromirrors; optical materials; silicon; silicon compounds; SiO₂-Si; blue light; drum-type micromirror; dynamic deformation; high-speed scanning; mirror plate; optical flatness; optically flat surface; stress concentration; stretched membrane; stretched polycrystalline membrane; surface deformation; surface distortion; Etching; Micromirrors; Optical reflection; Resists; Resonant frequency; Shape;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro-NanoMechatronics and Human Science (MHS), 2011 International Symposium on

Conference_Location

Nagoya

ISSN

Pending

Print_ISBN

978-1-4577-1360-6

Type

conf

DOI

10.1109/MHS.2011.6102188

Filename

6102188