• DocumentCode
    2631885
  • Title

    Laser terahertz emission microscope and its application

  • Author

    Tonouchi, Masayoshi

  • Author_Institution
    Inst. of Laser Eng., Osaka Univ., Japan
  • fYear
    2005
  • fDate
    22-28 Oct. 2005
  • Firstpage
    242
  • Lastpage
    243
  • Abstract
    Laser terahertz emission microscope (LTEM) is proposed and developed. Two-dimensional images of THz emission are successfully captured from various kinds of materials and devices. The results suggest that the LTEM system will be a useful tool for scientific imaging, and inspecting LSI chips.
  • Keywords
    measurement by laser beam; submillimetre wave imaging; LSI chip inspection; LTEM system; THz emission; Two-dimensional images; laser terahertz emission microscope; scientific imaging; Circuit faults; Laser excitation; Laser theory; Microscopy; Optical pulses; Optical pumping; Ultrafast electronics; Ultrafast optics; Visualization; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Society, 2005. LEOS 2005. The 18th Annual Meeting of the IEEE
  • Print_ISBN
    0-7803-9217-5
  • Type

    conf

  • DOI
    10.1109/LEOS.2005.1547969
  • Filename
    1547969
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2631885