Title :
Oxide-confined high index contrast ridge waveguide curved resonator laser diodes
Author :
Liang, Di ; Wang, Jusong ; Hall, Douglas C.
Author_Institution :
Dept. of Electr. Eng., Notre Dame Univ., IN, USA
Abstract :
A simple, novel self-aligned deeply-etched plus wet thermally oxidized ridge waveguide fabrication process is demonstrated which enables high-index-contrast, low loss curved resonator GRINSCH lasers with a bend radius as low as 10 μm.
Keywords :
etching; laser cavity resonators; optical losses; semiconductor lasers; waveguide lasers; GRINSCH lasers; curved resonator laser diodes; deep etching; high index contrast laser diodes; low loss curved resonator; oxide-confined laser diodes; ridge waveguide fabrication; ridge waveguide laser diodes; self-aligned fabrication; wet thermal oxidation; Diode lasers; Geometrical optics; Laser modes; Optical pulses; Optical resonators; Optical scattering; Optical waveguides; Oxidation; Semiconductor lasers; Waveguide lasers;
Conference_Titel :
Lasers and Electro-Optics Society, 2005. LEOS 2005. The 18th Annual Meeting of the IEEE
Print_ISBN :
0-7803-9217-5
DOI :
10.1109/LEOS.2005.1548322
