Title :
Molecular Beam Epitaxy: A Production Tool
fDate :
29 Jul-2 Aug 1991
Keywords :
Calibration; Diode lasers; Gallium arsenide; HEMTs; MESFETs; Molecular beam epitaxial growth; Production; Satellite broadcasting; TV; Throughput;
Conference_Titel :
Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
Print_ISBN :
0-87942-618-7
DOI :
10.1109/LEOSST.1991.638914
