Title :
Application of Design of Computer Experiments (DoCE) method for the extraction of the elasto-plastic behavior law of ECD copper through nano-indentation tests
Author :
Moreau, Stephane ; de Crecy, Francois ; Mandrillon, Vincent
Author_Institution :
Univ. Grenoble Alpes, Grenoble, France
Abstract :
This paper report a new methodology combining finite element modeling (FEM) and nanoindentation tests in order to extract the plasticity law of ECD copper film. Thanks to this approach, we demonstrate that simple plasticity law (ANSYS Multilinear ISOtropic hardening (MISO) [1]) reaches the goal of fitting instead of more complex ones (Hollomon-like models [2]). In addition, there is no unique solution but a set of good solutions!
Keywords :
design of experiments; elastoplasticity; electrodeposition; finite element analysis; nanoindentation; ANSYS multilinear isotropic hardening; DoCE method; ECD copper film; FEM; MISO; design of computer experiments method; elasto-plastic behavior law; finite element modeling; nanoindentation tests; plasticity law; Atmospheric measurements; Curve fitting; Displacement measurement; Erbium; Lead; Particle measurements; Reliability;
Conference_Titel :
Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2015 16th International Conference on
Conference_Location :
Budapest
Print_ISBN :
978-1-4799-9949-1
DOI :
10.1109/EuroSimE.2015.7103084
