Title :
Very Smooth AiGaAs/GaAs Quantum-wells Grown By Metalorganic Chemical Vapor Disposition
Author :
Dupuis, Russell D. ; Neff, James G. ; Pinzone, Christopher J.
Author_Institution :
NSF Science & Technology Research Center
fDate :
29 Jul-2 Aug 1991
Keywords :
Chemicals; Epitaxial growth; Gallium arsenide; MOCVD; Microelectronics; Molecular beam epitaxial growth; Quantum well devices; Quantum wells; Substrates; Temperature distribution;
Conference_Titel :
Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
Print_ISBN :
0-87942-618-7
DOI :
10.1109/LEOSST.1991.638944