Title :
Wavelength trimming of integrated-optic microring filters by plasma treatment
Author :
Wang, Tzyy-Jim ; Huang, Yen-Hao ; Chen, Hsuen-Li
Author_Institution :
Inst. of Electro-Opt. Eng., Nat. Taipei Univ. of Technol., Taiwan
Abstract :
The resonant-wavelength trimming of integrated-optic microring filters using oxygen plasma treatment is demonstrated. By adjusting treatment parameters, the resonant wavelength can be effectively tuned in the range of 8.9 nm.
Keywords :
integrated optics; micromachining; micromechanical devices; optical waveguide filters; plasma materials processing; O; integrated-optic microring filter; oxygen plasma treatment; resonant wavelength; wavelength trimming; Integrated optics; Optical filters; Optical resonators; Optical waveguides; Plasma applications; Plasma waves; Radio frequency; Resonance; Resonator filters; Silicon compounds;
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
Print_ISBN :
0-7803-7766-4
DOI :
10.1109/CLEOPR.2003.1274522
