• DocumentCode
    2650806
  • Title

    Low-damage Dry Etching Of Optoelectronic Devices: Assessment And Solutions

  • Author

    Hu, E.L.

  • Author_Institution
    University of California, Santa Barbara, CA
  • fYear
    1991
  • fDate
    29 Jul-2 Aug 1991
  • Firstpage
    32
  • Lastpage
    32
  • Keywords
    Dry etching; Optoelectronic devices; Spontaneous emission; Surface treatment;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
  • Print_ISBN
    0-87942-618-7
  • Type

    conf

  • DOI
    10.1109/LEOSST.1991.639004
  • Filename
    639004
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2650806