Title :
Semi-Insulating Inp Obtained by Co-Implantation of Mg and Ti
Author :
Salvi, M. ; Viallet, J.E. ; Haridon, H. L´ ; Favennec, P.N. ; Gauneau, M.
Author_Institution :
Centre National d´´Etudes des Telecommunications, France
Keywords :
Annealing; Conductivity; Indium phosphide; Iron; MOCVD; Magnesium; Semiconductor materials; Substrates; Titanium; Zinc;
Conference_Titel :
Semi-Insulating III-V Materials, 1992 Proceedings of the 7th Conference on
Print_ISBN :
0-7503-0242-9
DOI :
10.1109/SIM.1992.752678