DocumentCode

2652964

Title

Infrared absorption in proton- and deuteron-implanted semi-insulating Inp: Fe

Author

Fischer, D.W. ; Manasreh, M.O. ; Matous, G. ; Pearton, S.J.

Author_Institution

AT&T Bell Laboratories, Murray Hill, NJ

fYear

1992

fDate

21-24 Apr 1992

Firstpage

259

Lastpage

263

Keywords

Annealing; Electromagnetic wave absorption; Hydrogen; Implants; Impurities; Indium phosphide; Infrared spectra; Iron; Passivation; Protons;

fLanguage

English

Publisher

ieee

Conference_Titel

Semi-Insulating III-V Materials, 1992 Proceedings of the 7th Conference on

Print_ISBN

0-7503-0242-9

Type

conf

DOI

10.1109/SIM.1992.752709

Filename

752709