Title :
Analysis Of The Electromagnetic Excitation Of The Discharge In An ECR Multipolar Plasma Source
Author :
Tan, Wei ; Mak, Pui-In ; Grotjohn, Timothy A.
Author_Institution :
Michigan State University
Keywords :
Electromagnetic analysis; Electromagnetic heating; Electrons; Fault location; Plasma applications; Plasma materials processing; Plasma properties; Plasma simulation; Plasma sources; Plasma temperature;
Conference_Titel :
Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
Conference_Location :
Tampa, FL, USA
Print_ISBN :
0-7803-0716-X
DOI :
10.1109/PLASMA.1992.697861
