Title :
Reliability issues in SOI technologies and circuits
Author :
Pelloie, Jean-Luc
Author_Institution :
SOISIC, Grenoble, France
Abstract :
After explaining why SOI technologies bring higher speed, lower power consumption, higher integration and future CMOS perspectives, this paper addresses the reliability issues at the different stages of the development cycle: SOI wafer, device and circuit design.
Keywords :
elemental semiconductors; integrated circuit design; integrated circuit reliability; silicon; silicon-on-insulator; SOI device; SOI wafer; Si; circuit design; circuit reliability; silicon-on-insulator; Integrated circuit design; Integrated circuit reliability; Silicon; Silicon on insulator technology;
Conference_Titel :
Bipolar/BiCMOS Circuits and Technology Meeting, 2003. Proceedings of the
Print_ISBN :
0-7803-7800-8
DOI :
10.1109/BIPOL.2003.1274956
