Title :
Passive tuning in lateral-mode thin-film piezoelectric oscillators
Author :
Shahmohammadi, Mohsen ; Dikbas, Derya ; Harrington, Brandon P. ; Abdolvand, Reza
Author_Institution :
Dept. of Electr. & Comput. Eng., Oklahoma State Univ., Tulsa, OK, USA
Abstract :
In this paper, for the first time frequency tuning in lateral-mode thin-film piezoelectric resonators is demonstrated through varying the termination load connected to an isolated tuning port. The dependency of frequency tuning on the design features of the resonator is studied as well. More than 4300ppm tuning range in a thin-film piezoelectric-on-silicon (TPoS) resonator and more than 9000ppm tuning range in a pure piezoelectric resonator is achieved at ~29.5MHz and ~31.5MHz respectively. Also, an oscillator tuning range of more than 2700ppm is reported which shows a great potential for temperature compensated oscillators.
Keywords :
compensation; crystal oscillators; micromechanical resonators; piezoelectric oscillations; thin film devices; tuning; lateral mode; oscillator tuning; passive tuning; temperature compensated oscillators; thin film piezoelectric resonators; thin film piezoelectric-on-silicon; time frequency tuning; Electrodes; Frequency measurement; Impedance; Oscillators; Resonant frequency; Silicon; Tuning;
Conference_Titel :
Frequency Control and the European Frequency and Time Forum (FCS), 2011 Joint Conference of the IEEE International
Conference_Location :
San Fransisco, CA
Print_ISBN :
978-1-61284-111-3
DOI :
10.1109/FCS.2011.5977303