Title :
Ultra-high-frequency temperature-compensated oscillators based on ovenized AlN contour-mode MEMS resonators
Author :
Tazzoli, Augusto ; Piazza, Gianluca ; Rinaldi, Matteo
Author_Institution :
Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA
Abstract :
This work demonstrates the possibility of achieving good temperature stability in ultra-high frequency AlN MEMS CMR based oscillators by means of resonator ovenization. This technique results in low power consumption, fast turn-on time, and good short term stability. Over the temperature range -45 ÷ 85 °C, the 582 MHz oscillator exhibits a temperature stability as good as 125 ppm (limited by the electronic circuitry) and stable phase noise values better than -93 dBc/Hz at 1 kHz, and -160 dBc/Hz at 10 MHz offsets.
Keywords :
III-V semiconductors; aluminium compounds; micromechanical resonators; oscillators; wide band gap semiconductors; AlN; contour-mode MEMS resonators; frequency 1 kHz; frequency 582 MHz; phase noise values; power consumption; resonator ovenization; temperature stability; ultrahigh frequency MEMS CMR based oscillators; ultrahigh-frequency temperature-compensated oscillators; Micromechanical devices; Oscillators; Resonant frequency; Temperature control; Temperature distribution; Temperature measurement; Temperature sensors;
Conference_Titel :
Frequency Control Symposium (FCS), 2012 IEEE International
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-4577-1821-2
DOI :
10.1109/FCS.2012.6243643
