DocumentCode :
2658973
Title :
Impact of doping and microstructure on quality factor of CVD diamond micromechanical resonators
Author :
Najar, Hadi ; Chan, Mei-Lin ; Xie, Jin ; Lin, Liwei ; Horsley, David A.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of California, Davis, CA, USA
fYear :
2012
fDate :
21-24 May 2012
Firstpage :
1
Lastpage :
5
Abstract :
The effect of doping and microstructure is explored on CVD diamond MEMS resonators. Hundreds of surface micromachined double ended tuning fork (DETF) resonators were fabricated in nanocrystalline diamond (NCD) and microcrystalline diamond (MCD) films deposited using hot filament CVD technique with varying levels of Boron doping. High resistivity (1926 MΩ·cm) NCD cantilevers and DETF demonstrated impressive Q-factors of 232,562 at f = 61.86 kHz and Q = 201,435 at f = 263.66 kHz, respectively. These Q´s are the highest Q-factors yet reported for diamond resonators and the highest for cantilevers fabricated from any polycrystalline material. Higher boron doping resulted in reduced Q due to defect losses. Higher surface loss was observed in both MCD and NCD as doping increased. Observed Q-factors were almost the same for MCD and NCD at frequencies near 10 MHz.
Keywords :
Q-factor; boron; chemical vapour deposition; crystal microstructure; diamond; doping; microfabrication; micromechanical resonators; B; C; CVD diamond MEMS resonators; CVD diamond micromechanical resonators; DETF resonators; MCD films; NCD films; boron doping; defect losses; doping effect; frequency 263.66 kHz; frequency 61.86 kHz; high resistivity NCD cantilevers; hot filament CVD technique; impressive Q-factors; microcrystalline diamond films; microstructure effect; nanocrystalline diamond; polycrystalline material; quality factor; surface loss; surface micromachined double ended tuning fork resonators; Boron; Damping; Diamond-like carbon; Doping; Films; Q factor; Resonant frequency;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Frequency Control Symposium (FCS), 2012 IEEE International
Conference_Location :
Baltimore, MD
ISSN :
1075-6787
Print_ISBN :
978-1-4577-1821-2
Type :
conf
DOI :
10.1109/FCS.2012.6243675
Filename :
6243675
Link To Document :
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