Title :
SiGe and Si Optical Modulators
Author :
Cassan, E. ; Marris-Morini, D. ; Vivien, L. ; Maine, S. ; Pascal, D. ; Laval, S. ; Fedeli, J.M.
Author_Institution :
Dept. of microelectron. & optoelectron. devices, Univ. Paris-Sud, Orsay
Abstract :
Modulation-doped SiGe-Si multiple quantum well and all-silicon modulators embedded in reverse biased PIN junctions and integrated in SOI waveguides are described. Experimental evidence for electrorefractive effect is presented, and frequency operation is investigated
Keywords :
Ge-Si alloys; electro-optical effects; elemental semiconductors; integrated optics; optical modulation; optical waveguides; semiconductor materials; semiconductor quantum wells; silicon-on-insulator; SOI waveguides; Si optical modulator; SiGe optical modulator; SiGe-Si; all-silicon modulators; electrorefractive effect; frequency operation; modulation-doped SiGe-Si multiple quantum well; reverse biased PIN junction; Epitaxial layers; Germanium silicon alloys; High speed optical techniques; Nonlinear optics; Optical interferometry; Optical modulation; Optical refraction; Optical variables control; Optical waveguides; Silicon germanium;
Conference_Titel :
Group IV Photonics, 2006. 3rd IEEE International Conference on
Conference_Location :
Ottawa, Ont.
Print_ISBN :
1-4244-0096-1
DOI :
10.1109/GROUP4.2006.1708155
