DocumentCode :
2662423
Title :
A novel optimization procedure for designing of high-sensitivity piezoresistive accelerometers utilizing MNA method
Author :
Tran, Tan D. ; Bui, Tung T. ; Nguyen, Thuy P.
Author_Institution :
MEMS & Microsyst. Dept., VNUH, Hanoi, Vietnam
fYear :
2009
fDate :
9-11 Nov. 2009
Firstpage :
44
Lastpage :
47
Abstract :
This paper presents the novel optimization procedure for designing of high-sensitivity piezoresistive accelerometers using a MNA tool called SUGAR. The purpose of this novel method is to achieve the high sensitivity device. The dimension of sensor is as small as 1.5 mm2, so it is suitable for many specific applications.
Keywords :
accelerometers; microsensors; piezoresistive devices; MEMS technology; high sensitivity device; high-sensitivity piezoresistive accelerometers; sensor dimension; Accelerometers; Design optimization; Piezoresistance;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro-NanoMechatronics and Human Science, 2009. MHS 2009. International Symposium on
Conference_Location :
Nagoya
Print_ISBN :
978-1-4244-5094-7
Electronic_ISBN :
978-1-4244-5095-4
Type :
conf
DOI :
10.1109/MHS.2009.5352097
Filename :
5352097
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2662423
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