Title :
Large Area Fine Line Patterning by Scanning Projection Lithography
Author :
Müller, Heinrich G. ; Yuan, Yanrong ; Sheets, Ronald E.
Author_Institution :
TAMARACK Scientific, CA
Keywords :
Costs; Geometry; Laminates; Lithography; Manufacturing; Optical design; Optical distortion; Optical films; Substrates; Transistors;
Conference_Titel :
Multichip Modules, 1994. Proceedings of the 1994 International Conference on
Print_ISBN :
0-930815-39-4
DOI :
10.1109/ICMCM.1994.753536
