Title :
High Confinement Micro-Ring Resonators in Silicon-on-Insulator
Author :
Martinez, Linnell ; Lipson, Michal
Author_Institution :
Dept. of Electr. & Comput. Eng., Cornell Univ., Ithaca, NY
Abstract :
We demonstrate high confinement silicon devices including suspended micrometer-scale ring resonators with high Q´s in a CMOS platform
Keywords :
CMOS integrated circuits; integrated optoelectronics; micro-optics; microcavities; optical resonators; silicon-on-insulator; CMOS platform; Si-SiO2; high confinement silicon devices; microring resonators; silicon-on-insulator; Arm; Optical devices; Optical losses; Optical resonators; Optical ring resonators; Optical scattering; Optical waveguides; Resonance light scattering; Silicon on insulator technology; Stimulated emission;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708249
