Title :
An In-Situ Measurement Technique for Through-Plane Thermal Properties of Thin Dielectric Films
Author :
Hodge, Thomas C. ; Bidstrup, S.A. ; Kohl, Paul A. ; Lee, J.B. ; Allen, Mark G.
Author_Institution :
Georgia Institute of Technology
Keywords :
Capacitors; Dielectric films; Dielectric measurements; Dielectric substrates; Dielectric thin films; Electrodes; Geometry; Measurement techniques; Permittivity; Polymer films;
Conference_Titel :
Multichip Modules, 1994. Proceedings of the 1994 International Conference on
Print_ISBN :
0-930815-39-4
DOI :
10.1109/ICMCM.1994.753573
