Title :
Nanoimprint Patterned Aluminum Photonic Grating for Refractive Index Measurement
Author :
Skinner, J.L. ; Hunter, L.L. ; Talin, A.A. ; Provine, J. ; Horsley, D.A.
Author_Institution :
California Univ., Davis, CA
Abstract :
The first reported square array of subwavelength holes patterned with nanoimprint lithography in an aluminum film is presented. Optical modes vary linearly with the refractive index of the fluid in contact with the aluminum grating
Keywords :
aluminium; diffraction gratings; nanolithography; nanopatterning; optical testing; refractive index measurement; soft lithography; aluminum film; aluminum photonic grating; fluid refractive index; nanoimprint lithography; nanoimprint pattern; optical modes; optical testing; refractive index measurement; square array; subwavelength holes; Aluminum; Gratings; Optical films; Optical filters; Optical refraction; Optical sensors; Optical surface waves; Optical variables control; Refractive index; Sea surface;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708269