DocumentCode

2663563

Title

The Spherical Pinch As A Soft X-ray Source For microlithography And Other Industrial Applications

Author

Aithal, Sachin ; Lamari, Moktar ; Panarella, E.

Author_Institution

Advanced Law and Fusion Technology, Inc.

fYear

1993

fDate

1-3 June 1993

Firstpage

158

Lastpage

158

Keywords

Lightning; Magnetic confinement; Plasma confinement; Plasma properties; Plasma sources; Plasma x-ray sources; Production; Radiography; Voltage; X-ray imaging;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on

Conference_Location

Tampa, FL, USA

Print_ISBN

0-7803-0716-X

Type

conf

DOI

10.1109/PLASMA.1992.697951

Filename

697951