Title :
Large Displacement Deformable Mirrors Made by Low Stress Polyimide Membrane
Author :
Yeh, Yu-Wei ; Chiu, Chen-Wei E. ; Su, Guo-Dung J.
Author_Institution :
Graduate Inst. of Electro-Opt. Eng., Nat. Taiwan Univ., Taipei
Abstract :
The paper describes the design and fabrication of a micro-electro-mechanical systems (MEMS) deformable mirror made by a compliant organic thin film. The residual stress and Young´s modulus of a polymer film are measured and discussed. The deformation as large as 41 mum is achieved by electrostatic force with 170 V applied
Keywords :
Young´s modulus; adaptive optics; deformation; internal stresses; micro-optomechanical devices; micromirrors; optical design techniques; optical fabrication; polymer films; 170 V; Young´s modulus; deformation; large displacement deformable mirrors; low stress polyimide membrane; microelectro-mechanical system mirror; optical MEMS design; optical MEMS fabrication; organic thin film; polymer film; residual stress; Biomembranes; Electrostatic measurements; Fabrication; Microelectromechanical systems; Micromechanical devices; Mirrors; Polyimides; Polymer films; Residual stresses; Stress measurement;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708292
